JPH0451131U - - Google Patents
Info
- Publication number
- JPH0451131U JPH0451131U JP9233790U JP9233790U JPH0451131U JP H0451131 U JPH0451131 U JP H0451131U JP 9233790 U JP9233790 U JP 9233790U JP 9233790 U JP9233790 U JP 9233790U JP H0451131 U JPH0451131 U JP H0451131U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- semiconductor materials
- air filter
- air
- drying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9233790U JPH0451131U (en]) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9233790U JPH0451131U (en]) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451131U true JPH0451131U (en]) | 1992-04-30 |
Family
ID=31828705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9233790U Pending JPH0451131U (en]) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451131U (en]) |
-
1990
- 1990-08-31 JP JP9233790U patent/JPH0451131U/ja active Pending
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